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KSI V400E是一款高产能声学显微镜,可以对塑封集成电路IC、IGBT大功率模组, 各型电容、以及铜基板器件进行无损检测,分析器件内部之分层、裂缝、空洞等 缺陷。 X轴和Y轴均是新型超高速线性伺服电机,磁悬浮结构,扫描速度快,比常规机器 要快30%以上同时经久耐用。 能对器件作多种扫描模式,如点扫描(A-)、纵剖扫描(B-)、横剖扫描(C-)、多 层横剖扫描(X-)等。
大扫描范围:400mm x 400mm;(常 规机器一般约是300mm x 300mm)
磁悬浮超高速机型,扫描速度:2米/秒; 扫描加速度:30米/秒2,KSI一台机器相 当于常规机器2台的工作量。(常规机器小 于1米/秒)
高扫描重复精度:+/-0.1微米(常规机器 只能做到0.5微米)
低噪防误判专利探头(常规机器没有, 无法在高速扫描时去除水花导致的误判)
1.电子和声学显微系统单元
⑴放大倍率:625倍
⑵探头频率:5MHz~400MHz可选
⑶探头焦距:2mm ~ 50mm 可选
⑷模数转换AD卡 1GHz
⑸声学信号激发和接收装置带宽:5MHZ ~ 555MHz
⑹图像显示器24英寸2个
⑺图像格式:BMP、JPG、sam原厂格式
⑻图像分辨率:3.2万像素 x 3.2万像素
2.机械扫描单元
⑴X/Y/Z轴驱动系统是直线磁悬浮电机
⑵X轴和Y轴的扫描速度:2000mm/s,加速度是30米/平方秒
⑶扫描范围:400mm x 400mm
⑷X轴和Y轴的精度:+/-0.1微米
⑸Z轴是自锁步进电机驱动
⑹Z轴调焦行程:100mm
⑺检件台:标准、托盘、真空吸附、定制等可选
⑻样品槽:580mm x 780mm x 110mm (W x D x H)
3.软件单元:
⑴主控软件:Ksi Vision
⑵扫描模式:A-、B-、C-、D-、G-、P-、Tray-、X-、Z-、3D-
⑶众多可选配置:透射模组/三维图像分析软件/滤波器等
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